Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook illustrates optimization strategies, techniques and assembly pathways to achieve the combination of complex, even 3D structures with simple manufacturing steps. INDICE: Introduction I. Technologies Innovative exposure techniques for 3-D microfabrication Large Surface Area Techniques PTFE photo-fabrication by SR (TIEGA process) Photomask Technologies Photomask Comparisons Galvanics and Molding Simulating New LIGA Processes Commercial Simulation Program Simulation Tools for Design Design for Assembly and Safe Manufacturing II. Applications Market Analysis and Commercialization of LIGA Optical MEMS and Polymer Optics Micromechanics RF Applications Evolution of the Spectrometer Microfluidics in Biotechnology MEMS (actuators) Microfluidics for Biochip Applications Ultrasonic Transducers Swiss Luxury Watches Using MEMS Components III. Outlook Extreme Nanostructuring Novel Resist Systems Hard Gold Interferential X-ray Lithography Table-top Synchrotrons for Future Light Sources and their Application in Microfabrication
- ISBN: 978-3-527-31698-4
- Editorial: Verlag Chemie
- Encuadernacion: Cartoné
- Páginas: 476
- Fecha Publicación: 01/08/2008
- Nº Volúmenes: 1
- Idioma: Inglés