Thin film metal-oxides: fundamentals and applications in electronics and energy
Ramanathan, S.
Thin Film Metal-Oxides is an excellent overview of the fundamentals of thin films, such as microstructure and select deposition techniques. Functional properties of thin films are discussed within the context of applications in electronics (dielectrics for transistors, memory devices) and energy (fuel cell membranes, solar cells and gas separation). Readers will find a detailed description of atomic deposition of metal oxide thin films, gate dielectrics in advanced transistor devices and thin film mesostructured oxides for solar energy conversion, from leading academic and industry researchers. Engineers and advanced graduate students involved with electronic materials and alternate energy will find Thin Film Metal-Oxides a useful reference. Analyzes thin film deposition techniques for oxides with a special emphasis on high quality oxide fabrication Explores the functionalities and effects of nanostructures in thin film properties Discusses materials issues in oxide thin films and the relationship to applications Describes low temperature oxide thin film synthesis INDICE: Introduction to and fundamentals of metal-oxides.- Synthesis of epitaxial oxide thin films.- Low temperature synthesis of metal-oxide films.- Atomic layer deposition of metal-oxide thin films.- Characterization of thin film metal-oxides.- In-situ characterization of thin film complex oxides using synchrotron sources.- Characterization of thin film metal-oxides by atomic-resolution electron microscopy.- Thin film oxides for advanced memory devices.- Thin film complex oxides for multi-functionality.- Thin film oxides for microwavetunable devices.- Thin film magnetic oxides for spintronics.- Thin film microstructured oxides for solar energy conversion.- Thin film oxides for solid oxide fuel cells.- Thin film oxides for gas separation.- defect chemistry in nanostructured oxides.
- ISBN: 978-1-4419-0663-2
- Editorial: Springer
- Encuadernacion: Cartoné
- Páginas: 300
- Fecha Publicación: 01/10/2009
- Nº Volúmenes: 1
- Idioma: Inglés