This book provides a comprehensive treatment of the chemical and optical phenomena in lithography in a manner that is accessible to a general readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age. The related aspects of lithography are thematically presented to convey a unified view of the developments in the field over time, from the very first recorded reflections on the nature of matter to the latest developments at the frontiers of lithography science and technology
- ISBN: 978-1-1180-3002-8
- Editorial: John Wiley & Sons
- Encuadernacion: Cartoné
- Fecha Publicación: 29/12/2010
- Nº Volúmenes: 1
- Idioma: Inglés