Smart Sensors and MEMs: Intelligent Devices and Microsystems for Industrial Applications

The second edition of Smart Sensors and MEMS continues to address key topics in the field of sensors and expands the scope of the book to include new important applications including: magnetic sensors, temperature sensors, and microreaction chambers. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. New chapters within this section include chapters on magnetic and temperature sensors. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. New chapters that address key applications such as; magnetic sensors, microreaction chambers, temperature sensorsIn-depth information on a wide array of industrial applications for smart sensors and smart MEMSOnly book to discuss both smart sensors and MEMS for industrial applications INDICE: 1. What makes sensor devices and microsystems 'intelligent' or 'smart'? 2. Interfacing sensors to microcontrollers: a direct approach 3. Temperature Sensors 4. Capacitive sensors for displacement measurement in the sub-nanometer range 5. Integrated inductive displacement sensors for harsh industrial environments 6. Magnetic Sensors 7. Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range 8. Integrated polarization analyzing CMOS image sensors for detection and signal processing 9. Advanced interfaces for resistive sensors 10. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications 11. Advanced optical incremental sensors: encoders and interferometers 12. Microfabrication technologies used for creating smart devices for industrial applications 13. Microactuators: design and technology 14. Microreaction Chambers 15. Dynamic behavior of smart MEMS in industrial applications 16. MEMS integrating motion and displacement sensors 17. MEMS print heads for industrial printing 18. Photovoltaic and fuel cells in power MEMS for smart energy management 19. Radio frequency (RF)-MEMS for smart communication microsystems 20. Smart acoustic sensor array (SASA) system for real-time sound processing applications

• ISBN: 978-0-08-102055-5
• Editorial: Woodhead Publishing
• Encuadernacion: Rústica
• Páginas: 600
• Fecha Publicación: 01/03/2018
• Nº Volúmenes: 1
• Idioma: Inglés