Nonthermal plasma chemistry and physics

Nonthermal plasma science and technology are rapidly developing, but information on both subjects has been scattered until now. Nonthermal Plasma Chemistryand Physics provides a comprehensive presentation of the basics of plasma physics as well as new developments in the rapidly growing field of nonthermal plasma chemistry. The book offers a detailed discussion of the fundamental elementary processes in plasma chemistry. Expert contributors address environmentalaspects of plasma chemistry and how plasma chemistry can comply with the Kyoto protocol. The book also includes particular plasma conditions and specific applications in microelectronics and more.

• ISBN: 978-1-4200-5916-8
• Editorial: CRC Press
• Encuadernacion: Cartoné
• Páginas: 544
• Fecha Publicación: 26/02/2010
• Nº Volúmenes: 1
• Idioma: Inglés