Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
?- ISBN: 978-3-6581-9237-2
- Editorial: Springer Vieweg
- Encuadernacion: Rústica
- Páginas: 316
- Fecha Publicación: 13/10/2017
- Nº Volúmenes: 1
- Idioma: Inglés