This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing. Based on a course taught by the author for over 25 years at the University of North Carolina, this book offers a unique and informative blend of fundamental science, processing, and applications. Exercises and a liberal addition of application examples are provided, along with extensive references to the primary literature to guide readers in understanding microelectronicmaterials as well as design new materials and applications.
- ISBN: 978-0-470-17447-0
- Editorial: John Wiley & Sons
- Encuadernacion: Cartoné
- Páginas: 536
- Fecha Publicación: 22/02/2008
- Nº Volúmenes: 1
- Idioma: Inglés