Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics

Cristiano, Fuccio
La Magna, Antonino

182,00 €(IVA inc.)

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering. Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomenaAddresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulationsReviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors INDICE: PART I GENERAL ASPECTS 1. Historical perspective on laser-related developments 2. Laser-matter interactions (including ultra-fast) 3. Atomistic modeling of laser-related phenomena PART II MAINSTREAM NANOELECTRONICS APPLICATIONS 4. Laser annealing applications in CMOS technology 5. Materials Science issues related to the fabrication of highly doped junctions by laser annealing of group IV semiconductors 6. Continuum modeling and TCAD simulations of laser-related phenomena in CMOS applications PART III BEYOND CMOS APPLICATIONS 7. Laser fabricated superconductive Si and related applications 8. Optical hyperdoping 9. Laser Engineering of Graphene and Related Materials

  • ISBN: 978-0-12-820255-5
  • Editorial: Woodhead Publishing
  • Encuadernacion: Rústica
  • Páginas: 325
  • Fecha Publicación: 01/03/2021
  • Nº Volúmenes: 1
  • Idioma: Inglés