Acoustic wave and electromechanical resonators: concept to key applications

This groundbreaking book provides a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, professionals find extensive coverage of these devices at both the technology and application levels. This practical reference offers guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping practitioners to choose the right approaches for their projects. INDICE: Preface. Part I: Introduction to Thin-Film Bulk Acoustic Wave Resonators (FBAR), Micro and Nano Electro Mechanical System (M/NEMS) Resonators – MEMS and NEMS Resonator Technologies. Acoustic Resonator Technologies. Design and Modeling of Micro and Nano Resonators. Part II: Fabrication Technologies and CMOS Integration – Fabrication Techniques. Characterization Techniques. Performance Optimization. Integration of Resonator to CMOS Technologies. Part III: Applications of FBAR, MEMS, NEMS Resonators – Sensor Applications. Radio Frequency (RF) Applications. Case Studies: Modeling, Design and Fabrication of FBAR and MEMS-Based Systems.

• ISBN: 978-1-60783-977-4
• Editorial: Artech House
• Encuadernacion: Cartoné
• Páginas: 390
• Fecha Publicación: 01/03/2010
• Nº Volúmenes: 1
• Idioma: Inglés