This book covers the latest advances and developments of piezoelectric MEMS resonators in industry and academia. The materials, design, manufacturing and applications of piezoelectric MEMS resonators are covered in detail. The piezoelectric MEMS manufacturing process is covered in detail, with a focus on AlN MEMS resonators, such as those commercialized by IDT, Avago and Triquint, or under development at Sand 9. This book is ideal for engineers, MEMS technical groups, inventors, graduate students, and academic researchers interested in piezoelectric MEMS resonators.
- ISBN: 978-3-319-28686-0
- Editorial: Springer
- Encuadernacion: Cartoné
- Páginas: 300
- Fecha Publicación: 08/09/2016
- Nº Volúmenes: 1
- Idioma: Inglés